Overview of micro-electro-mechanical devices and technologies, Definitions of mechanical, thermal, electrical, magnetic, optical, and chemical properties of materials Brief review of standard microelectronic fabrication technologies; detailed discussion of bulk micromachining, surface micromachining, bonding technologies, LIGA technology and related fabrication methods; Introduction to static behavior of elementary beams, membranes, and plates; effects of residual stress and stress gradients; dynamic and normal modes; damping; Use of capacitive, inductive, optical, piezoresistive, and piezoelectric methods for sensing Pressure Sensors and Accelerometers, Resonant Sensors and Drive Circuits; Principles of resonant sensors and how resonators interact with drive electronics; rate gyroscopes; System partitioning; drive and sense circuits; feedback stability; noise, packaging.
Suggested Text:
- Microsystem Design by Stephen D. Senturia
- An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf